|5600LS AFM Enhanced Sample Versatility_ 2-Inch Multi-Sample Wafer Vacuum Chuck 5991-2015EN c20140723||Keysight 5600LS AFM
Enhanced Sample Versatility:
2-Inch Multi-Sample Wafer Vacuum Chuck
The Keysight Technologies, Inc. 5600 LS AFM, already one of the most versatile
atomic force microscopy systems on the market (with a fully programmable
200 mm stage that allows complete access over a full 200 mm in X/Y travel), has
added yet another highly useful configuration.
A new 2" (52 mm) multi-sample wafer vacuum chuck can now be added to the
Keysight 5600 LS AFM, providing system users the ability to image up to one
dozen 2" wafers. Important to the growing LED market (e.g., GaN devices on
sapphire substrates) and to a variety of optoelectronics devices on InP and
GaAs wafers, this multi-sample wafer vacuum chuck option allows unattended
automation of imaging and measuring up to 12 samples.
Ideal for process development and monitoring, the Keysight 5600 LS AFM has
a high-precision 200 mm X/Y stage and built-in automation to create complex
automated imaging on multiple samples.