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Keysight Technologies
On-Wafer SOLT Calibration Using
4-port PNA-L Network Analyzers
(N5230A Options x4x)



Application Note
Introduction

This application note is intended for on-wafer applications using the 4-port,
PNA-L network analyzers with two dual probes to achieve full 4-port on-wafer
calibrations manually. 4-port PNA-L network analyzers are available in 13.5 or
20 GHz models. PNA-L firmware revision must be 6.03 or higher.

This documentation provides step-by-step instructions needed to set up a
calibration kit before a 4-port SOLT (Short-Open-Load-Thru) calibration can
be performed. The steps outlined here can be applied toward nearly any kind
of non-coaxial application, of which on-wafer is one.
Equipment used: