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S500 Integrated Test System
Keithley Instruments
28775 Aurora Road Administrative Guide
Cleveland, Ohio 44139
1-888-KEITHLEY
http://www.keithley.com

System Description
The S500 Integrated Test System is an instrument-based system configuration from Keithley Instruments used
primarily for semiconductor parametric characterization testing. The S500 has a wide degree of hardware
flexibility, allowing users to configure a system best suited for their applications. Table 1 lists general S500
configuration options, while Table 2 lists configurations used specifically for High Voltage and/or High Current
testing of high-power semiconductor devices.
Table 1
S500 system configuration choices

Series 2600 System SourceMeter Instruments