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Model 4290 Calibration System Specifications

DESCRIPTION

The Model 4290 Calibration System was specifically designed to facilitate calibration and verification of the Keithley Model 4200

Semiconductor Characterization System. In general terms, the Model 4290 is a collection of calibration resistors whose values are known

precisely. The resistors are characterized (measured precisely) prior to calibration and verification of the 4200-SCS. After characterization, the

calibration resistors are used in conjunction with a precision voltmeter to accurately measure currents ranging from 10-15 amps to 1 amp.

The Model 4290 is comprised of a Keithley Model 2002 Digital Multi-Meter, Keithley Model 708A Switching Matrix, and Keithley Model 7177

Reference Card (containing the calibration resistors). The Model 4290 can be configured for multi-channel operation by adding Model 708As

and Model 7177s. Each channel consists of a 708A / 7177 pair and is referred to as a System Reference Unit (SRU). Software to characterize the

Model 4290 SRUs and calibrate & verify the Model 4200-SCS is included with each Model 4200-SCS.

SPECIFICATION CONDITIONS

Specifications are the performance standards against which each channel of the Model 4290 is tested.

The NOMINAL RESISTANCE, RN, accuracies are specified at the termination of the supplied output cables, after 4 hour warm-up.

* T = 23C +/-5C

* RH between 5% and 60%, non-condensing.

The CHARACTERIZATION RESISTANCE, RCH, accuracies are specified at the termination of the supplied output cables, after 4 hour warm-

up.

* Within 24 hours of the resistor characterization process. Refer to the Keithley Model 4290 User's Manual for more information.

* T = TCH +/-4C, where TCH is the temperature when the resistors were characterized. T must be between 18C and 28C.

* RH = RHCH +/-5%, where RHCH is the relative humidity when the resistors were characterized. RH must be between 5% and 60%, non-

condensing.

NOMINAL RESISTANCE, RN CHARACTERIZATION RESISTANCE, RCH CHARACTERIZATION LIMITS 4

LOW IMPEDANCE HI IMPEDANCE CONDITIONS 3

OUTPUTS 1 OUTPUTS 2

VALUE ACCURACY VALUE ACCURACY VALUE ACCURACY CURRENT VOLTAGE MAX 5

MAX

(OHMS) +/- (%) (OHMS) +/- (PPM) (OHMS) +/- (PPM) (AMPS) (VOLTS) CURRENT VOLTAGE

(AMPS) (VOLTS)

1 1.00 (Note 6) 200 n/a unspecified 7.2 mA 7.2 mV 1.7 A 1.7 V

10 1.00 (Note 6) 100 n/a unspecified 7.2 mA 9.6 mV 540 mA 5.4 V

100 1.00 (Note 6) 80 n/a unspecified 960 uA 96 mV 170 mA 17 V

1K 0.10 (Note 6) 70 n/a unspecified 960 uA 96 mV 22 mA 22 V

10K 0.10 (Note 6) 70 n/a unspecified 96 uA 96 mV 7.1 mA 71 V

100K 0.10 (Note 6) 100 n/a unspecified 64 uA 6.4 V 2.2 mA 200 V

1M 0.10 n/a unspecified (Note 6) 100 6.4 uA 6.4 V 200 uA 200 V

9.99M 0.10 n/a unspecified (Note 6) 100 640 nA 6.4 V 20 uA 200 V

100M 1.00 n/a unspecified (Note 6) 100 64 nA 6.4 V 2 uA 200 V

1G 1.00 n/a unspecified (Note 6) 100 6.4 nA 6.4 V 200 nA 200 V

10G 1.00 n/a unspecified (Note 6) 200 640 pA 6.4 V 20 nA 200 V

100G 1.00 n/a unspecified (Note 6) 1000 64 pA 6.4 V 2 nA 200 V

Note 1: Bias current drift < 7 pA within 24 hours of characterization, T = TCH +/-4C, RH = RHCH +/-5%. Actual bias current measurement is

included with the characterization data.

Note 2: Bias current drift < 3 fA within 24 hours of characterization, T = TCH +/-4C, RH = RHCH +/-5%. Actual bias current measurement is

included with the characterization data.

Note 3: Nominal voltage & current levels present on the calibration resistors during the characterization process.

Note 4: MAX CURRENT and MAX VOLTAGE are the specified circuit overload conditions and are not for measurement to the specified

accuracy. Exceeding these limits will damage the respective calibration resistor.

Note 5: Internal voltage protection circuitry limits the useable characterization voltage to 7 volts.

Note 6: CHARACTERIZATION RESISTANCE, RCH, values are obtained from the characterization file generated by the Model 4290 control

software. Refer to the Keithley Model 4290 User's Manual for more information regarding the operation of this software. Rev A

8/23/01