Text preview for : 5600LS AFM Enhanced Sample Versatility_ 2-Inch Multi-Sample Wafer Vacuum Chuck 5991-2015EN c20140723 part of
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Keysight 5600LS AFM
Enhanced Sample Versatility:
2-Inch Multi-Sample Wafer Vacuum Chuck
The Keysight Technologies, Inc. 5600 LS AFM, already one of the most versatile
atomic force microscopy systems on the market (with a fully programmable
200 mm stage that allows complete access over a full 200 mm in X/Y travel), has
added yet another highly useful configuration.
A new 2" (52 mm) multi-sample wafer vacuum chuck can now be added to the
Keysight 5600 LS AFM, providing system users the ability to image up to one
dozen 2" wafers. Important to the growing LED market (e.g., GaN devices on
sapphire substrates) and to a variety of optoelectronics devices on InP and
GaAs wafers, this multi-sample wafer vacuum chuck option allows unattended
automation of imaging and measuring up to 12 samples.
Ideal for process development and monitoring, the Keysight 5600 LS AFM has
a high-precision 200 mm X/Y stage and built-in automation to create complex
automated imaging on multiple samples.
Whether you are monitoring an existing process or working to deine a new
generation of devices, the Keysight 5600 LS AFM offers powerful tools and
imaging modes to deliver uncompromising performance on your samples.
Contact your sales representative today for more information
or to receive a quotation for this new option
Topography images of GaN ilms grown on
sapphire. Bottom image shows local defects
circled in red.
The programmable stage allows user to pre-select points on
each wafer that are to be imaged.
AFM Instrumentation from Keysight
Keysight Technologies offers high-
precision, modular AFM solutions for
research, industry, and education.
Exceptional worldwide support is
provided by experienced application
scientists and technical service
personnel. Keysight's leading-edge
R&D laboratories are dedicated to the
timely introduction and optimization
of innovative and easy-to-use AFM
technologies.
www.keysight.com/find/afm
For more information on Keysight
Technologies' products, applications or
services, please contact your local Keysight
office. The complete list is available at:
www.keysight.com/find/contactus
Americas
Canada (877) 894 4414
Brazil 55 11 3351 7010
Mexico 001 800 254 2440
United States (800) 829 4444
Asia Paciic
Australia 1 800 629 485
China 800 810 0189
Hong Kong 800 938 693
India 1 800 112 929
Japan 0120 (421) 345
Korea 080 769 0800
Malaysia 1 800 888 848
Singapore 1 800 375 8100
Taiwan 0800 047 866
Other AP Countries (65) 6375 8100
Europe & Middle East
Austria 0800 001122
Belgium 0800 58580
Finland 0800 523252
France 0805 980333
Germany 0800 6270999
Ireland 1800 832700
Israel 1 809 343051
Italy 800 599100
Luxembourg +32 800 58580
Netherlands 0800 0233200
Russia 8800 5009286
Spain 0800 000154
Sweden 0200 882255
Switzerland 0800 805353
Opt. 1 (DE)
Opt. 2 (FR)
Opt. 3 (IT)
United Kingdom 0800 0260637
For other unlisted countries:
www.keysight.com/find/contactus
(BP-06-09-14)
This information is subject to change without notice.