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OPERATION AND SERVICE MANUAL
MODEL 4140B
pA METER/DC VOLTAGE SOURCE
SERIAL NUMBERS
- This manual applies directry to instruments with
serial numbers prefixed 2129 J .
With changes described in Section VU, this
manual also applies to instruments with serial
numbers prefixed 2034J.
`c COPYRIGHT YOKOGAWA-HEWLm-PACKARD. LTD., 1980
9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN
Manual Part No. 04140-90021
Microfiche Part No. 04140-90071 Printed : APR. 1987
Model 4140B
Table of Contents
TABLE OF CONTENTS
Sect ion Title Page Section Title Page
I GENERAL INFORMATION ............... l-l 3-33. VS Section
Operating Parameters ... 3-15
l-l. Introduction ................ l-l 3-35. Voltage Output
l-4. Description ................. l-l and Display of VS . . . . . . 3-15
1-9. Specification ............... 1-2 3-37. Output Voltage Range . . . . . 3-19
l-11, Safety Considerations ....... 1-2 3-39. Current Limit ............ 3-19
1-14. Instruments 3-41. VS Section
Covered by Manual ......... l-3 Operating Instructions . 3-19
1-19. Options .................... 1-13 3-43. I-V Measurement ............ 3-22
1-21. Option 907, 908 or 909 ... 1-13 3-45.~ I-V Measurement
l-23. Option 910 Extra Manual . . 1-13 Data Output ............ 3-22
l-25. Accessories Supplied ....... 1-13 3-47. I-V Measurement
l-27. Accessories Available ...... 1-13 Operating Instructions . 3-25
3-49. C-V Measurement ............ 3-29
3-51. C-V Measurement
Data Output ............ 3-29
II INSTALLATION ...................... 2-1 3-53. C-V Measurement Range . . . . 3-29
3-55. C-V Measurement
2-l. Introduction ................ 2-l Zero Offset ............ 3-32
2-3. Initial Inspection .......... 2-l 3-57. C-V Measurement
2-5. Preparation for Use ......... 2-l in Percent .. . . . . . . . . . . . 3-33
2-6. Power Requirements ........ 2-l 3-59. C-V Measurement
2-8. Line Voltage and Fuse Operating Instruct ions . 3-33
Selection ............... 2-1 3-61. DUT Connection ............. 3-41 _
2-10. Power Cable ............... 2-3 3-63. DUT Connection Using
2-12. Operating Environment ..... 2-3 the Wafer Prober ....... 3-44
2-15. Installation Instructions . 2-4 3-65. Annunciations .............. 3-47
2-17. Installation of 3-67. Analog Output .............. 3-49
Options 907, 908 and 909. 2-4 3-69. Control Capabilities for
2-19. Storage and Shipment ........ 2-4 Analog Output .......... 3-49
2-20. Environment ............... 2-4 3-71. HP-IB Interface ............ 3-52
2-22. Packaging ................. 2-4 3-73. Connection to HP-IB ...... 3-52
3-75. HP-IB Status Indicators .. 3-52
3-77. Local Key . . . . . . . . . . . . . . . . 3-52
III OPERATION ......................... 3-l 3-79. HP-IB Control Switch . . . . . 3-52
3-81. HP-IB Interface
3-l. Introduction ................ 3-1 Capabilities of 4140B . . 3-53
3-3. Panel Features .............. 3-l 3-83. Remote Program Code . . . . . . 3-53
3-5. Self Test ................... 3-l 3-85. Parameter Setting ........ 3-56
3-8. Initial Control Settings .... 3-8 3-87. Data Output .............. 3-56
3-10. Measurement Function ........ 3-8 3-89. 1-C Measurement Value and
3-12. pA (Pica-Ampere) Meter VA Output Voltage ...... 3-56
Section ................... 3-9 3-91. Parameter Output ......... 3-57
3-14. pA Meter Display .......... 3-9 3-93. Key Status Data . . . . . . . . . . 3-57
3-16. Current Measurement Ranges. 3-9 3-95. Service Request
3-18. Integration Time Statu Byte . . . . . . . . . . . . . 3-58
and Data Output ........ 3-10 3-97. High Speed I (HSI)
3-21. External Triggering ...... 3-10 Function ............... 3-58
3-23. Zero Offset for 3-99. Programming Guide
Current Measurement .... 3-11 for 4140B . . . . . . . . . . . . . . 3-60
3-25. pA Meter
Operating Instructions . 3-11
3-27. VS (Voltage Source) Section. 3-14
3-29. VS Section Display ....... 3-14
3-31. VS Section Output Modes . . 3-14
ii