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Excerpt Edition
This PDF is an excerpt from Chapter 3
of the Parametric Measurement Handbook.
The
Parametric Measurement
Handbook




Third Edition
March 2012
Chapter 3: Source/Monitor Unit (SMU) Fundamentals
"You do not really understand something unless you can explain it to your
grandmother." -- Albert Einstein



SMU overview
Introduction
The primary measurement resource for parametric test is the source/monitor
unit or SMU. This is also sometimes also referred to as a source/measurement
unit, although the acronym ends up the same. The SMU can force voltage or
current and simultaneously measure voltage and/or current. The diagram below
shows a simplified SMU equivalent circuit:




A
V


Figure 3.1. Simplified SMU schematic.

Since SMUs must measure very low currents (1 fA or less), they always have
triaxial outputs for the reasons discussed in the previous chapter.

There are a variety of different types of SMUs. The most common SMU is the
medium-power SMU (MPSMU); as the name implies this SMU can supply
moderate levels of voltage and current (