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Agilent
Evaluation of MOS
Capacitor Oxide C-V
Characteristics Using the
Agilent 4294A
Application Note 4294-3
1 Introduction expanding the measurement 2 The differences
frequency range up to 110 MHz.
As a result of extremely high Furthermore, combining the between the 4284A
integration of logic LSIs, MOS 4294A with the Cascade
FETs with gate lengths of 0.1