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ON-WAFER MEASUREMENTS
WITH THE
HP 8510 NETWORK ANALYZER
AND
CASCADE MICROTECH WAFER PROBES
Eric Strid
President and C.E.O.
Cascade Microtech, Inc.
P.O. Box 2015
Beaverton, Oregon 97075
RF & Microwave
Measurement
Symposium
and
Exhibition
Flin- HEWLETT
~~ PACKARD
www.HPARCHIVE.com
Hewlett-Packard is pleased to have the opportunity to present this paper,
written by Eric Strid of Cascade Microtech, Inc., at the RF & Microwave
Measurement Symposium and Exhibition.
Abstract:
This paper presents a system, consisting of the HP 8510 network analyzer
and Cascade Microtech wafer probes, that is used to make RF measurements
of microwave devices and IC's (MMIC's) directly on-wafer. The
configuration of the system and the characteristics of the wafer probes are
described. Techniques for making the best possible on-wafer measurements
will also be addressed, and a range of on-wafer measurement applications
will be examined.
Biography
Eric Strid received his BSEE degree at MIT in 1974 and MSEE degree from
UC Berkeley in 1975. He first worked on microwave MIC's at Farinon
Transmission Systems, San Carlos, CA. In 1979, he joined the gallium
arsenide research group at Tektronix, which has recently evolved into
TriQuint Semiconductor. In 1983, he co-founded Cascade Microtech, Inc.,
where he is now President and CEO. Eric has published various papers on
power GaAs FET's, noise figure measurements, analog and digital GaAs
IC's, and high-frequency wafer probing.
www.HPARCHIVE.com
In this talk, we'll be covering the basics and
some details of how to use the Cascade
Microtech Wafer Probe System with HP 8510
Vector Network Analyzer.
ON-WAFER MEASUREMENTS
WITH THE HP 8510 NETWORK ANALYZER
AND CASCADE MICROTECH WAFER PROBES
5315
We'll start with an introduction of the
problem of wafer probing at very high
frequencies and a discussion of the
requirements of a probe for microwave
frequencies. Then we'll talk about the
mechanical and electrical aspects of the
OUTLINE Cascade probe system and how it is
I. Introduction calibrated at the probe tips. We'll then
II. The Wafer Probe System move to error corrected measurements using
III. Measurement Considerations a Vector Network Analyzer and some of the
IV. Typical Measurements and Applications error considerations therein. Finally, some
typical measurements and applications will
be discussed.
There are a variety of uses for wafer probes
at microwave frequencies. One of the
5316 obvious applications is that you can get
immediate measurements on wafers that
have just been completed without having to
thin them, dice them out, and bond them
into fixtures. It also keeps the positional
information between the die intact so that
you can do a wafer map of RF parameters
WHY PROBE AT MICROWAVE FREQUENCIES? and use this data to work on process yield