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www.thinksrs.com-RightQuad.pdf www.thinkSRS.com Choosing a Quadrupole Gas Analyzer Application Note #9 Modern-day contamination control requirements for gas phase Residual Gas Analyzers processes are constantly pushing the limits of performance of quadrupole gas analyzers. The quadrupole technology is The prototypical residual gas analyzer (RGA) has an open ion rapidly evolving and adapting to lower contamination level source (OIS) and is mounted directly on a vacuum chamber so specifications. A good understanding of the various factors that the entire sensor is at the same pressure as the rest of the affecting the detection capabilities of the different gas analysis vacuum system. Small physical dimensions make it possible systems currently available is an essential tool when selecting to attach an RGA to virtually any vacuum system, including a sensor f


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