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Choosing a Quadrupole Gas Analyzer
Application Note #9
Modern-day contamination control requirements for gas phase Residual Gas Analyzers
processes are constantly pushing the limits of performance of
quadrupole gas analyzers. The quadrupole technology is The prototypical residual gas analyzer (RGA) has an open ion
rapidly evolving and adapting to lower contamination level source (OIS) and is mounted directly on a vacuum chamber so
specifications. A good understanding of the various factors that the entire sensor is at the same pressure as the rest of the
affecting the detection capabilities of the different gas analysis vacuum system. Small physical dimensions make it possible
systems currently available is an essential tool when selecting to attach an RGA to virtually any vacuum system, including
a sensor for a specific application. As is usually the case, most |