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Original Chassis:AR132
Descr: HP Publikacje AR132.pdf
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Uploaded:2020-03-06 05:42:21
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AR132.pdfComparing the Accuracy and Repeatability of On-Wafer Calibration Techniques to 110GHz Anthony J Lord Cascade Microtech Europe Ltd, 3 Somerville Court, Banbury Business Park, Adderbury, Oxfordshire, UK [email protected] Abstract Methods & Limitations Many methods of making corrected S-Parameters Three different calibration standard substrates were measurements are available for on-wafer devices and used for the comparisons. One GaAs substrate for the circuits. This is a comparative study of calibration NIST Multi-Line (LRL) calibration [1], and two alumina techniques, presented as most accurate and repeatable

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