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Stanford Research Systems

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File nameText Hoongsun Im and Jim Lee, R&D Engineers, Standford Research Systems, Sunnydale, CA sample valve open, while the blue traces show the response with the R esidual gas analyzers (RGAs) have long been used to charac- terize the components of a gas mixture. They are based on a valve closed. In the single DP configuration, the RGA still picks up sig- quadrupole mass spectrometer with a hot filament ionizer. A nificant concentrations of hydrogen from backstreaming. However, in turbomolecular pump (TP) is commonly used to generate the high vac- the dual DP configuration, when the sample valve is closed the hydro- uum region (<10-5 Torr) required to operate the ionizer and quadrupole. gen signal drops to a level consistent with internal degassing. The data More recently, a variety of applications for atmospheric sampling were show the backstreaming problem is virtually e

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