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Accurate Impedance
Measurement with
Cascade Microtech
Probe System
Application Note 1369-3
1. Introduction
More ICs or circuit modules are used in electronic circuits
to save spaces, more capacitors or inductors, such as
thin dielectric layers and pattern inductors, tend to be
developed on wafer or substrate. These devices usually
have a small capacitance or inductance like pF, nH range.
The Agilent E4991A RF Impedance/ Material Analyzer
and Agilent 4294A Precision Impedance Analyzer have a
wide impedance coverage as well as a good accuracy and
offer an accurate on-wafer or micro-component impedance
measurement solution with probe stations. In this
application note, details of installation and calibration
methods are discussed.
2. 1-Port Impedance Measurement
Application using Probe Station
Table 2-1 shows major 1-port impedance measurement series with a probe station can provide very good
applications. Capacitance or inductance needs |
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