2871 Probe Card WP.pdf | | WHITE
PA P E R
Probe card considerations when migrating to new testers
Yang Pan
Keithley Instruments, Inc.
Introduction
For on-wafer automatic parametric testers, the probe card is the interface
between the test head and the device pads on the wafer, so it is key to achieving
a successful electrical measurement. The probe cards specified by each of the
two dominant parametric tester companies, Agilent and Keithley Instruments,
are incompatible with the other's testers. Therefore, when fabs change to a
new tester type, such as from an Agilent 4000 Series tester to a Keithley S600
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