|a-133.pdf||40 GHz ON-WAFER MEASUREMENTS
HP 8510 NETWORK ANALYZER
CASCADE MICROTECH WAFER PROBES
Eric Strid, Reed Gleason, Keith Jones
Cascade Microtech, Inc.
P.O. Box 2015
Beaverton, Oregon 97075
RF & Microwave
Hewlett-Packard is pleased to have the opportunity to present this paper, written by Eric
Strid, Reed Gleason, and Keith Jones, of Cascade Microtech, Inc., at the RF & Microwave
Measurement Symposium and Exhibition.
The paper presents a system, consisting of the HP 8510 network analyzer and Cascade
Microtech wafer probes, that is used to make RF measurements of microwave devices and
ICs (MMICs) directly on-wafer for frequencies up to 40 GHz. The configuration of the
system and the characteristics of the wafer probes are des|