Keithley 2962 Semiconductor Manufacturing free download

File name 2962_Semiconductor_Manufacturing.pdf

A GREAT ER M EA SU R E O F C O N F I D E N C E for NBTI identifies "NBTI recovery during interim measurements" as the concern that motivates reliability researchers to continue to refine test techniques. Experimental data reveals that the time slope of measured degradation is strongly dependent on meas- urement delay and measurement speed. Several measurement techniques have been developed to minimize measurement delay and increase measurement speed while monitoring process-induced BTI shifts. Each of these techniques has benefits and drawbacks. Here we examine some of these techniques including on-the-fly measure- On-The-Fly ments and discuss the instrument require- ments related to effective implementations of BTI application. Threshold Voltage On-the-fly (OTF) techniques BTI characterization is becoming a Measurement for BTI critical test in semiconductor design and