Keithley 4200 CV AN free download

File name 4200 CV AN.pdf

Number 2239 Application Note Gate Dielectric Capacitance-Voltage Series Characterization Using the Model 4200 Semiconductor Characterization System Introduction Understanding MOS-Capacitor Maintaining the quality and reliability of gate oxides is one of C-V Measurements the most critical and challenging tasks in any semiconductor fab. C-V measurements are typically made on a capacitor-like device, With feature sizes shrinking to 0.18